Olicom 9600 User Manual Page 1

CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSHELIX TECHNOLOGY CORPORATIONhttp://www.helixtechnology.com 9600 Compressor Installation, Operation, and M

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 1-1: 9600 Compressor9600COM

9600 Compressor Description 1-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSpecificationsDimensionsThe dimensions of the Compressor are

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSWeightThe weight of the Compressor

9600 Compressor Description 1-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCooling WaterThe water used to cool the Compressor must meet

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-7CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSGeneralThe information in Table 1-

9600 Compressor Description 1-8 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSComponent DescriptionThe components of the 9600 Compressor th

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-9CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSystem Circuit BreakerThe System C

9600 Compressor Description 1-10 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSReturn Gas CouplingThe Return Gas Coupling returns the heliu

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-11CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCryopump Power Phase SwitchNOTE:

9600 Compressor Description 1-12 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 1-5: 9600 Compressor Connected to Multiple On-Board C

ELIXH©2004 Helix Technology Corporation Printed in USAThe information in this document is believed to be accurate and reliable. However, Helix Technol

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-13CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSMultiple Cryo-Torr Cryopump Conne

9600 Compressor Description 1-14 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 2-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 2 - Unpacking and Inspecti

Unpacking and Inspection2-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 2-1: Using the Shipping Carton RampCompressor InspectionIn

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 3 - InstallationIntroducti

Installation 3-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-1: 9600 Compressor Installation FlowchartSupply and Return Water Li

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSupply and Return Water Line Conne

Installation 3-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSElectrical ConnectionsThe following procedures provide information for makin

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-2: 9600 Compressor Circui

Installation 3-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSPhase CheckWARNINGFollow all high voltage safety precautions when performing

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-7CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCryopump Power Phase Switch Settin

Installation 3-8 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSDisconnecting1. Using two wrenches as shown in Figure 3-3, disconnect the tw

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-9CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSingle On-Board Cryopump Connectio

Installation 3-10 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSingle Cryo-Torr Cryopump ConnectionsCAUTIONMake sure the Compressor power

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-11CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSMultiple On-Board Cryopump Connec

Installation 3-12 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSPower Cable Connections1. Connect the On-Board Splitter Box power cable bet

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-13CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-7: Alternative Multiple

Installation 3-14 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS1. Connect the Supply and Return lines to the 9600 Compressor as described

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-15CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSNOTE: The Cryo-Torr Interface can

Installation 3-16 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-9: Alternative Multiple Cryo-Torr Cryopump InstallationCRYOPUMP PO

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4Table of ContentsSection 1 - 9600 Compressor DescriptionGeneral . . . . . . . . .

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 4 - OperationAdjusting Sys

Operation4-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSNOTE: The use of a higher helium charge pressure for 50 HZ operation is necessar

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSIf you have concerns about system

Operation4-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 5 - MaintenanceScheduled M

Maintenance5-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAdsorber ReplacementUse the following procedure to change the adsorber every t

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS9. Ensure that the pressure gauge

Maintenance5-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAdjusting System Helium PressureNOTE: These procedures can be performed on a c

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS• To the value previously recorded

Maintenance5-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS2. Purge the regulator and charging lines as follows:a. Open the regulator a s

9600 Compressor Installation, Operation, and Maintenance5 P/N 8040540Table of Contents (continued)Section 3 - InstallationIntroduction . . . . . . .

Document TitleELIXH©2004 Helix Technology Corporation Pub. No. 8040509, Rev. 101, 01/26/04 ECO No. 16210 A-1PrelimaryAppendix A - Customer Support Inf

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 B-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix B - Flow DiagramFigure B-

Appendix B - Flow DiagramB-2 P/N 8040540

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 C-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix C - Troubleshooting Proce

Appendix C - Troubleshooting ProceduresC-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSTable C-1: Compressor Troubleshooting ProceduresPr

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 C-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS3) System circuit breaker (CB1) w

Appendix C - Troubleshooting ProceduresC-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 D-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix D - Schematic

Figure D-1:9600 Motor Drive Compressor Schematic

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 6Table of Contents (continued)Appendix A - Customer Support InformationAppendix B

9600 Compressor Installation, Operation, and Maintenance7 P/N 8040540Table of Contents (continued)Figure 5-1: Disconnecting Self Sealing Couplings .

9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 1 - 9600 Compressor Descri

9600 Compressor Description 1-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSystem DocumentationThe manuals for a system cover two basic